Brooks Automation
Information provided within this document is subject to change without notice, and although believed to be accurate, Brooks Automation assumes no responsibility for any errors, omissions, or inaccuracies.
AcuLigner™, Advan Tag, AutoTeach™, ATR™, AXM™, BiSymmetrik™, CenterSmart™, Crate to Operate™, CrossingConnect™, DARTS™, Enerta™, e-RMA™, e-Spares™, e-Volution™, Falcon™, FIXLOAD™, FrogLeg™, GuardianPro™, Independent Twin Linear Exchange™, InCooler™, InLigner™, Isoport™, ITLX™, Jet™, Jet Engine™, LEAP™, LeapFrog™, LowProfile™, LPT™, M2 Nano™, Marathon 2, Marathon Express, PASIV™, Pathway™, PowerPak™, PowerTools™, PuroMaxx™, QuadraFly™, Radius™, Radient™, Radient Express™, Reliance™, Reliance ATR™, RetroEase™, SCARA™, SmartPM™, SMIF-INX™, SMIF-LPT™, SPOTLevel™, The New Pathway to Productivity™, Time Optimized Trajectory™, Time Optimal Trajectory™, Time Optimized Path™, TopCooler™, TopLigner™, VacuTran™, VersaPort™, WaferEngine™, LEAP™, Pathway™, GIO, GSB, Guidance 6600, Guidance 6430, Guidance 6420, Guidance 6410, Guidance 6000, Guidance 3400, Guidance 3300, Guidance 3200, Guidance 2600, Guidance 2400, Guidance 2300, Guidance 2200, Guidance 1400, Guidance 1300, Guidance 1200, Guidance 0200 Slave Amplifier, Guidance 0006, Guidance 0004, Guidance Controller, Guidance Development Environment, GDE, Guidance Development Suite, GDS, Guidance Dispense, Guidance Input and Output Module, Guidance Programming Language, GPL, Guidance Slave Board, Guidance System, Guidance System D4/D6, IntelliGuide, PreciseFlex™ 100, PreciseFlex™ 300, PreciseFlex™ 400, PreciseFlex™ 3400, PreciseFlex™ c3, PreciseFlex™ c5, PreciseFlex c8a™, PreciseFlex c10™, PreciseFlex™ 1300, PreciseFlex™ 1400, PreciseFlex™ DD4, PreciseFlex™ DD6, PreciseFlex™ DDR, PreciseFlex™ G5400, PreciseFlex™ G5600, PreciseFlex™ G6400, PreciseFlex™ G6410, PreciseFlex™ G6420, PreciseFlex™ G6430, PreciseFlex™ G6600, PreciseFlex™ GSB Slave Amp, PreciseFlex™ PFD0, PrecisePlace 100, PrecisePlace 0120, PrecisePlace 0130, PrecisePlace 0140, PrecisePlace 1300, PrecisePlace 1400, PrecisePlace 2300, PrecisePlace 2400, PrecisePower 300, PrecisePower 500, PrecisePower 1000, PrecisePower 2000, PreciseVision, IntelliGuide Vision, and RIO logos are trademarks of Brooks Automation.
Fusion®, Guardian®, MagnaTran®, Marathon®, Razor®, Spartan®, Vision®, Zaris®, and the Brooks and design logo are registered U.S. trademarks of Brooks Automation.
All other trademarks are properties of their respective owners.
© 2024 Brooks Automation. All rights reserved. The information included in this manual is proprietary information of Brooks Automation, and is provided for the use of Brooks customers only and cannot be used for distribution, reproduction, or sale without the express written permission of Brooks Automation.
This technology is subject to United States export Administration Regulations and authorized to the destination only; diversion contrary to U.S. law is prohibited.
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